Illumination device, exposure apparatus, and article manufacturing method

Abstract

This disclosure includes: a wavelength selection element (4) that transmits light of certain wavelengths from an LED light source (10); a driving unit (23) that drives the wavelength selection element (4); a spectrometer (21) that acquires the wavelength characteristics of the LED light source (10); and a control unit (22) that detects a change Δλ in the reference wavelength of the center wavelength of the LED light source (10) based on the wavelength characteristics acquired by the spectrometer (21), and drives the wavelength selection element (4) by the driving unit (23) based on the change Δλ in the reference wavelength of the center wavelength, such that the center wavelength of the LED light source (10) matches the center wavelength of the wavelength transmitted by the wavelength selection element (4). The present disclosure includes a wavelength selection element 4 transmitting light of some wavelengths among light from an LED light source 10, a drive unit 23 driving the wavelength selection element 4, a spectrometer 21 acquiring wavelength characteristics of the LED light source 10, and a control unit 22 detecting a change Δλ in a reference wavelength of a center wavelength of the LED light source 10 on the basis of the wavelength characteristics acquired by the spectrometer 21 and causing the drive unit 23 to drive the wavelength selection element 4 such that the center wavelength of the LED light source 10 matches the center wavelength of the wavelengths transmitted by the wavelength selection element 4 on the basis of the change Δλ in the reference wavelength of the center wavelength.

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