Manufacturing method for mechanical resonators

TW202640317APending Publication Date: 2026-10-01NIVAROX FAR SA
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Patent Information

Application Number
TW114144112
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-13
Filing Date
2025-11-12
Publication Date
2026-10-01

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Abstract

One aspect of the present invention relates to a method for manufacturing a set of mechanical resonators (2a), the mechanical resonators (2a) having structural features that are averaged within a predetermined range. The method includes a step in which mechanical resonators (2b, 2c) and at least one oscillating member (10a, 10b, 10c) are formed in a plate (1); and a step in which the dimensions of the formed resonators (2a) are modified based on calculated dimensional correction values ​​(28) to obtain the set of resonators (2a) having structural feature values ​​that are included within a predetermined range. One aspect of the invention relates to a method for manufacturing a set of mechanical resonators (2a) having structural characteristics with an average value comprised within a predetermined range, the method comprising a step in which the mechanical resonators (2b, 2c) and at least one oscillating member are formed (20) in the plate (1) (10a, 10b, 10c) and a step in which the dimensions of the resonators (2a) formed are modified (28) based on dimensional corrections calculated to obtain the set of resonators (2a) having structural characteristic values ​​comprised within the predetermined range of values.
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