Information processing device, light source device, and method of manufacturing article

Abstract

An information processing apparatus for predicting malfunctions in a light source device, the light source device comprising: a cooling unit for cooling a substrate on which a plurality of LEDs are disposed; and a first temperature acquisition unit and a second temperature acquisition unit for acquiring the temperature of the substrate; the information processing apparatus comprising: an information acquisition unit for acquiring first information acquired by the first temperature acquisition unit and second information acquired by the second temperature acquisition unit; and a prediction unit for predicting malfunctions in the light source device, wherein the first temperature acquisition unit and the second temperature acquisition unit are respectively disposed at positions on the substrate where different cooling forces are generated by the cooling unit, and the prediction unit predicts a plurality of types of malfunctions based on the first information and the second information.

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