MEMS component and method for operating a MEMS system

Abstract

This invention relates to a MEMS element (100), particularly a MEMS relay, having a first component (101) and a second component (103), the second component being movable relative to the first component (101) along a first direction (R1) between a neutral position (NS) and a contact position (KS), wherein a first peripheral contact component (105), a second peripheral contact component (107) spaced apart from the first peripheral contact component (105) along a second direction (R2) perpendicular to the first direction (R1), and a center contact component (109) disposed between the two peripheral contact components (105, 107) are formed on the first component (101), wherein the first peripheral corresponding contact component (11) 1) A second peripheral corresponding contact part (113) spaced apart from the first peripheral corresponding contact part (111) along the second direction (R2) and a center corresponding contact part (115) disposed between the two peripheral corresponding contact parts (111, 113) are formed on the second component (103), wherein the second component (103) is elastically mounted relative to the first component (101) via two spring parts (117, 119), wherein the two spring parts (117, 119) are formed on the second component (103) at two edge regions (121, 123) opposite to the second direction (R2), and wherein the two peripheral contact parts (105, 107) are selectively actuated. Furthermore, this invention relates to a method (200) for operating a MEMS system (300). The invention relates to a MEMS component (100), in particular MEMS relay, having a first component element (101) and a second component element (103), which is movable with respect to the first component element (101) along a first direction (R1) between a neutral position (NS) and a contacting position (KS), wherein a first peripheral contact element (105), a second peripheral contact element (107), which is spaced apart from the first peripheral contact element (105) along a second direction (R2) perpendicular to the first direction (R1) and a central contact element (109), which is arranged between the two peripheral contact elements (105, 107), are formed on the first component element (101), wherein a first peripheral countercontact element (111), a second peripheral countercontact element (113), which is spaced apart from the first peripheral countercontact element (111) along the second direction (R2) and a central countercontact element (115),which is arranged between the two peripheral countercontact elements (111, 113), are formed on the second component element (103), wherein the second component element (103) is mounted resiliently relative to the first component element (101) via two spring elements (117, 119), wherein the two spring elements (117, 119) are formed on the second component element (103) at two edge regions (121, 123), which lie opposite with respect to the second direction (R2), and wherein the two peripheral contact elements (105, 107) are selectively activatable. The invention furthermore relates to a method (200) for operating a MEMS system (300).,

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