Adjustable millimeter wave RF MEMS switch

Abstract

The present invention relates to a millimeter wave RF MEMS switch, comprising a substrate, a signal line, a metal beam, capacitive coupling structuresand a short circuited stub. The metal beam consists of fixed ends, bending portions, and an adsorption portion. The metal beam is connected to the substrate, driving electrodes, and signal line. The capacitive coupling structures are located between the bending portions and the driving electrodes, providing the adsorption force for the MEMS switch. This switch is disposed on a LCP substrate and supports millimeter waves operating frequencies. It surpasses mainstream 26GHz switches in the market, and enables higher operating frequencies to millimeter wave frequency bands. The MEMS switch operates with a low adsorption voltage and is suitable for flexible printed circuit with low transmission loss. Broad prospects for applications are anticipated.

Images