Systems and methods for achieving an ion energy distribution function with non-sinusoidal bias and capacitance
TW202640683APending Publication Date: 2026-10-01LAM RES CORP
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Patent Information
- Application Number
- TW114146826
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-05
- Filing Date
- 2025-12-01
- Publication Date
- 2026-10-01
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Figure TWG2TA001078614_001 
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Abstract
A system for achieving an ion energy distribution function (IEDF) is described. The system includes a plurality of switches and a plurality of capacitors. The plurality of capacitors includes a plurality of shunt capacitors. Each of the plurality of shunt capacitors is coupled to a respective one of the plurality of switches to be coupled to a radio frequency (RF) transmission line to achieve the IEDF. The RF transmission line is coupled between a nonsinusoidal bias voltage source and a plasma chamber.
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