Charged particle beam energy width reduction apparatus, method of operating thereof, and charged particle beam device

Abstract

A charged particle beam energy width reduction apparatus for a charged particle beam device having an optical axis is described. The charged particle beam energy width reduction apparatus includes a first round lens configured to decelerate a primary charged particle beam and to focus the primary charged particle beam in a focusing plane; a charged particle deflector assembly configured to generate dispersion in the focusing plane, the charged particle deflector assembly comprising: a first electrostatic charged particle deflector arranged on the optical axis and comprising two flat conducting surfaces; and a second electrostatic charged particle deflector comprising two flat conducting surfaces; the charged particle beam energy width reduction apparatus further comprising: a beam limiting opening in an aperture body positioned in the focusing plane and off-axis with respect to the optical axis.

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