Platform device and charged particle beam device equipped with it, optical inspection device

TW202640686APending Publication Date: 2026-10-01HITACHI HIGH TECH CORP
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Patent Information

Application Number
TW115109696
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-17
Filing Date
2026-03-16
Publication Date
2026-10-01

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Abstract

A platform device capable of suppressing elastic deformation of a platform, and a charged particle wire device and an optical inspection device incorporating the same are provided. The platform device comprises: a platform for holding a sample; a horizontal drive unit for driving the platform horizontally; a vertical drive unit for driving the platform vertically; and a control unit for controlling the horizontal and vertical drive units. The control unit reverses the phase of the horizontal and vertical drive units at a specific frequency calculated based on the frequency characteristics of the platform when driven horizontally and vertically.
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