Charged particle wire device

Abstract

[Problem to be solved] To correct the distortion caused by the influence of charged particles, thereby improving the length measurement accuracy. [Solution] The imaging unit (101) scans the sample multiple times under specified optical conditions to obtain a scan image. The computer (100) accumulates and corrects the frame image to obtain the scan image. The corrected frame image is obtained by correcting the frame image generated by the imaging unit for the i-th scan to obtain the scan image using a pre-calculated transformation matrix (i is an integer of 2 or more). The i-th transformation matrix is ​​calculated as a matrix that transforms the first coordinate group in the reference image containing the pattern into the second coordinate group corresponding to the first coordinate group in the frame image generated by the i-th scan to calculate the transformation matrix.

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