Workpiece processing apparatus and extraction plate

Abstract

A workpiece processing apparatus allowing the extraction of charged ions through an extraction aperture and the passage of radicals and reactive neutrals through vents is disclosed. Plasma sheath modulation and electric fields may be used to determine the extraction angle of the charged ions. The extraction plate also includes a plurality vents, separate from the extraction aperture, wherein the vents do not have a line of sight path from the interior of the plasma chamber to the exterior. In this way, any ions that enter the vents are neutralized prior to exiting the vents. A cover sheet may be used to select which vents are used for a particular process.

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