MEMS microphone

TW202640912APending Publication Date: 2026-10-01LG INNOTEK CO LTD
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Patent Information

Application Number
TW114143973
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-04-08
Filing Date
2025-11-11
Publication Date
2026-10-01

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Abstract

According to the present embodiment, a MEMS microphone includes a first substrate; a second substrate disposed on the first substrate; a MEMS structure disposed on the second substrate; and a signal processing element disposed on the second substrate and spaced apart from the MEMS structure, in which the first substrate includes a plurality of first pads formed on one surface, each of the plurality of first pads have a via formed therein, and the signal processing element is connected to the via by a wire.
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