Light source unit and optical heating apparatus
TW202640931APending Publication Date: 2026-10-01USHIO INC
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Patent Information
- Application Number
- TW114145164
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-09
- Filing Date
- 2025-11-19
- Publication Date
- 2026-10-01
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Abstract
Providing a light source unit and an optical heating apparatus capable of efficiently heating a semiconductor substrate while suppressing shortening of the lifetime of an LED element. The light source unit includes: a plurality of LED elements; an LED substrate on which the plurality of LED elements are arranged; a lens substrate disposed to face the LED substrate; and a plurality of lens elements formed on the lens substrate at positions corresponding respectively to the LED elements, wherein an LED density, obtained by dividing an effective number of the LED elements located within a first region by an area of the first region, is set between
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