Piezoelectric laminate and method for manufacturing piezoelectric laminate

Abstract

This invention provides a piezoelectric laminate with a piezoelectric film having good insulation and voltage resistance. The piezoelectric laminate of this invention comprises: a substrate; a lower electrode film on the substrate; and a piezoelectric film on the lower electrode film, which comprises a perovskite oxide represented by the general formula ABO3, wherein the A portion contains K and Na and the B portion contains Nb; and when the crystal orientation in the upper surface of the piezoelectric film is determined by electron beam backscattering diffraction and the area ratios of the (001) plane, (110) plane, and (111) plane are calculated respectively, the ratio of the total area ratio of the (110) plane and the (111) plane to the total area ratio of the (001) plane, the (110) plane, and the (111) plane is greater than 10% and less than 70%, the arithmetic mean roughness of the upper surface is less than 8 nm, and the root mean square roughness of the upper surface is less than 12 nm.

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