Process for the manufacture of a pseudo-donor substrate comprising a plurality of tiles made of single-crystal gallium nitride
TW202641174APending Publication Date: 2026-10-01SOITEC SA
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Patent Information
- Application Number
- TW115108901
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-13
- Filing Date
- 2026-03-11
- Publication Date
- 2026-10-01
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Abstract
The invention relates to a process for the manufacture of a substrate, referred to as pseudo-donor substrate, comprising a plurality of tiles made of single-crystal gallium nitride (GaN) arranged next to one another on a support substrate, comprising: - the formation of a bonding layer
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