Metrology module with non-flat mirror for chemical mechanical polishing systems
TW202641211APending Publication Date: 2026-10-01APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW115103960
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-02-04
- Filing Date
- 2026-02-02
- Publication Date
- 2026-10-01
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Abstract
A metrology module for use with a substrate processing system includes a camera for scanning a substrate and a light source configured to direct light toward the substrate at a non-zero incidence angle. The module also includes a reflector having a non-flat mirror configured to reflect light to the camera. The non-flat mirror is configured to receive light reflected from the substrate at a consistent reflected angle.
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