Brush nodule with ribbed surface

Abstract

Textured polyvinyl alcohol (PVA) brush nodules and brush assemblies are disclosed for wet cleaning of sensitive substrates such as semiconductor wafers. A cylindrical brush includes a core configured for rotation and a plurality of PVA nodules disposed on the core. Each nodule has a nodule face including molded-in surface geometry (e.g., ridges and grooves) configured to disrupt and redistribute liquid at a brush / substrate interface, promote interface shear, and reduce hydroplaning-like fluid lift to help maintain contact under wet conditions. In certain embodiments, a fluid management arrangement directs cleaning liquid toward the nodule faces so that liquid exits predominantly at or through the nodule faces, improving purging and reducing water and chemistry consumption. Modular rail embodiments and manufacturing methods, including planar tray molds with CNC-machined cavity face surface geometry for forming textured nodule faces, are also described.

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