Substrate boat and batch-type substrate processing apparatus

Abstract

The present disclosure relates to a substrate boat capable of stably supporting a plurality of substrates and a batch-type substrate processing apparatus. The substrate boat configured to load a plurality of substrates in multiple stages according to an embodiment of the present disclosure includes an upper support plate and a lower support plate, which face each other, and a plurality of pillars interposed between the upper support plate and the lower support plate, which are spaced apart from each other. Each of the plurality of support pillars may include a body part extending in one direction, a plurality of stepped parts provided on a side surface of the body part, and a plurality of support balls provided to protrude further than a top surface of each of the plurality of stepped parts.

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