Handling equipment and teaching methods

Abstract

This invention relates to a transport device for transporting substrates, comprising: a first fork, a second fork, a transport robot, a transport chamber, an optical sensor, and a control device. The first fork has a first holding portion having a mounting surface of the substrate, a sensor disposed at the front end of the first holding portion, a cable connected to the sensor and mounted only on one side of the first holding portion in the width direction, and a rotating shaft extending in the vertical direction. The second fork has a second holding portion having a mounting surface of the substrate and a rotating shaft coaxial with the first fork. The transport robot has the first fork and the second fork. The transport chamber can accommodate the transport robot. The robot is depressurized; the optical sensor is installed in the transport chamber with its optical axis pointing vertically; when the other side of the first holding part where the cable is not installed in the width direction is taken as the non-wiring side, the control device causes the first fork to rotate, and the optical sensor detects the edge position of the non-wiring side of the first holding part, i.e., the first edge position, and causes the second fork to rotate, and the optical sensor detects the edge position of the second holding part on the same side as the non-wiring side, i.e., the second edge position, and calculates the difference in rotation angle between the first fork and the second fork based on the first edge position and the second edge position.

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