electrostatic chuck

TW202641279APending Publication Date: 2026-10-01TOTO LTD
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Patent Information

Application Number
TW114141985
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-17
Filing Date
2025-10-29
Publication Date
2026-10-01

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    Figure TWG2TA001078396_003
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Abstract

The objective of this invention is to provide an electrostatic chuck that can effectively cool a substrate. The solution is an electrostatic chuck 10, comprising: a dielectric substrate 100; and a base plate 200 having a coolant flow channel 250 through which coolant flows. In this electrostatic chuck 10, the dielectric substrate 100 and the base plate 200 are joined together, and the coolant flow channel 250 is a groove G formed on the surface 210 of the base plate 200 on the dielectric substrate 100 side.
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