Wafer status inspection system and semiconductor process equipment

TW202641296APending Publication Date: 2026-10-01BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Patent Information

Application Number
TW115109532
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-25
Filing Date
2026-03-13
Publication Date
2026-10-01

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Abstract

This disclosure provides a wafer status inspection system and semiconductor process equipment. In the wafer status inspection system, two first inspection modules of the first inspection device are disposed on the outer side of the cavity wall of the process chamber. Each first inspection module includes a first inspection signal transmitting unit for emitting a first inspection signal in a first horizontal direction and a first inspection signal receiving unit for receiving the first inspection signal. The controller is used to generate the first inspection information of the wafer according to the transmission path of the first inspection signal and to determine the wafer status based on the first inspection information.
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