Drying condition search system

TW202641301APending Publication Date: 2026-10-01HORIBA LTD
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Patent Information

Application Number
TW115110003
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-19
Filing Date
2026-03-17
Publication Date
2026-10-01

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Abstract

The present invention is a drying condition exploration system 100 in process information science that explores the optimal drying conditions with high precision by managing the state of the material coated on the substrate. It includes a material coating section 3 that coats material C1 onto the substrate C2, and a material state measuring section 6 that measures the state of the material C1 coated from the material coating section 3. The present invention relates to a drying condition search system 100 that accurately searches for optimal drying conditions by managing the state of a material to be applied to a substrate in Process Informatics. The system includes a material coating unit 3 that applies material C1 to a substrate C2, and a material state measuring unit 6 that measures the state of material C1 applied from the material coating unit 3.
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