Methods for depicting charged particle beams, apparatus for depicting charged particle beams, methods for calculating irradiation dose, and computer-readable recording media.

Abstract

[Problem to be solved] To suppress the increase in computational load while calculating the irradiation amount that can improve the resolution of charged particle beam drawing. [Solution] According to one aspect of the irradiation amount calculation method of the present invention, the irradiation amount of the charged particle beam used to draw a graphic pattern in the drawing area based on design data is calculated. In this method, the drawing area to which the aforementioned graphic pattern is to be drawn is imaginarily divided into a plurality of first mesh regions by a first mesh size, the first area density of the aforementioned graphic pattern arranged in each first mesh region is calculated, and the first irradiation amount X of the individual beam is calculated using the aforementioned first area density, with the grid intersections of the control grids set at intervals smaller than the aforementioned first mesh size in the aforementioned drawing area as the irradiation positions. The second irradiation amount Y of the aforementioned individual beam is obtained by using the aforementioned first irradiation amount X and a pre-set transformation formula, i.e., function Y=F(X).

Images