Stage mechanism, charged particle beam irradiation apparatus, and charged particle beam irradiation method

TW202641307APending Publication Date: 2026-10-01NUFLARE TECH INC
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Patent Information

Application Number
TW115104683
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-03-27
Filing Date
2026-02-05
Publication Date
2026-10-01

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Abstract

According to one aspect of the present invention, a stage mechanism includes four or more support members configured to include a first support member whose upper end is arranged at a first height, and a second support member whose upper end is arranged at a second height lower than the first height, wherein any one of the plurality of substrates is supported by either one of by respective upper ends of support members of a first group which is composed of three or more support members including the first support member in the four or more support members, and by respective upper ends of support members of a second group which is composed of three or more support members including the second support member in the four or more support members.
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