Processing device

Abstract

This invention provides a processing apparatus that improves the cleanliness of the housing and enhances the effect of preventing contamination by particles or the like in the area where workpieces are processed. Specifically, the processing apparatus of this invention is a processing apparatus 10 for processing workpieces, comprising: a processing unit 40 disposed within a housing 11 for processing workpieces; a first air supply unit 20 that supplies purified gas downward from the upper surface of the housing 11 into the housing 11; a second air supply unit 30 that supplies purified gas laterally from the side of the housing 11 into the housing 11; and an exhaust unit 13 that exhausts gas from inside the housing 11 to the outside of the housing 11; the second air supply unit 30 is configured to supply purified gas to a designated area (workpiece processing area 12) where the processing unit 40 processes the workpieces.

Images