Semiconductor manufacturing apparatus, lifting method and method for manufacturing semiconductor apparatus

Abstract

The subject of this disclosure is to provide a technique that simplifies the setting of a lifting sequence. The solution is a semiconductor manufacturing apparatus comprising: a lifting unit having a plurality of blocks, each of which is independently movable up and down; a head having a clamp for adsorbing a die and being movable up and down; and a control unit configured to: configure the lifting sequence of the plurality of blocks into a plurality of steps, and by inputting a setting item on a setting screen that allows inputting the height of the plurality of blocks for each step, set a plurality of lifting parameters, and control the operation of the plurality of blocks based on the set lifting parameters.

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