Cleanroom external air fluidized bed purification equipment

Abstract

This invention relates to a fluidized bed purification device for external air in a cleanroom. It primarily utilizes a combination design of an outside air unit, a fluidized bed purification device, an outside air conditioning unit (MAU), and a cleanroom. The fluidized bed purification device is equipped with an adsorption unit, allowing the outside air to enter and contact the adsorption material flowing on the fluidized bed plate, thus filtering out micro-pollutants from the outside air. The air is then sent into the outside air conditioning unit (MAU) and subsequently to the cleanroom for use. This significantly reduces the amount of micro-pollutants entering the cleanroom and reduces the filtration burden on the cleanroom's chemical filters, thereby increasing their lifespan.

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