Manufacturing methods and manufacturing systems of glass substrates

TW202641787APending Publication Date: 2026-10-16UNITED BENEFIT
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Patent Information

Application Number
TW114127613
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-04-14
Filing Date
2025-07-21
Publication Date
2026-10-16

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Abstract

Disclosed is a manufacturing method and a manufacturing system of a glass substrate, the manufacturing system includes a solution storage tank, a processing chamber, a boost pump and a buck pump, wherein the solution storage tank is used for being filled with process solution; the processing chamber has a substrate placement area, a boost area and a buck area, the glass substrate for use of packaging can be placed horizontally and fixed in the substrate placement area, the boost area is located below the substrate placement area, the buck area is located above the substrate placement area; the boost pump connects to the solution storage tank and the boost area via pipeline; and the buck pump connects to the solution storage tank and the buck area via pipeline.
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