Composite sintered body and electrostatic chuck

Abstract

A composite sintered body having excellent thermal conductivity and capable of being suitably applied to an electrostatic chuck utilizing JR force is provided. A composite sintered body according to one embodiment of the present invention includes a plurality of crystal grains and grain boundaries. Each of the plurality of crystal grains includes an aluminum nitride crystal phase. The grain boundaries are located between adjacent crystal grains among the plurality of crystal grains. The grain boundaries include an yttrium aluminate crystal phase. The average grain size of the plurality of crystal grains is

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