Pre-treatment for molybdenum gap-fill

TW202641994APending Publication Date: 2026-10-16LAM RES CORP
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Patent Information

Application Number
TW114149322
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-17
Filing Date
2025-12-16
Publication Date
2026-10-16

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Abstract

Methods for deposition of molybdenum (Mo) in features include treating a feature surface prior to Mo deposition. According to various embodiments, the methods involve an oxidizing plasma preclean followed by a non-plasma metal halide treatment. Molybdenum deposition is then performed.
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