Vacuum pump and stator disc

Abstract

To provide a vacuum pump including a plurality of stages of Siegbahn exhaust mechanisms, and a stator disc of each of the Siegbahn exhaust mechanisms used in the vacuum pump enabling an exhaust process to be efficiently performed by connecting the plurality of stages of Siegbahn exhaust mechanisms in parallel without providing a communication port in a rotor disc. In the vacuum pump including a Siegbahn exhaust mechanism according to an embodiment, a partition wall divides a flow channel to the Siegbahn exhaust mechanism into a plurality of channel systems, and gas divided by the partition wall is sent in parallel to the plurality of stages of exhaust mechanisms stacked on each other. This gas flows as indicated by the arrows in Fig.

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