Turbomolecular vacuum pump and method for monitoring deposits

Abstract

The turbomolecular vacuum pump (1) comprises: a stator (2); a rotor (3) configured to rotate in the stator (2) to drive a gas to be pumped along a gas flow path disposed between the stator (2) and the rotor (3); and at least one capacitive deposit sensor (30); the turbomolecular vacuum pump (1) is characterized in that the detection head of the capacitive deposit sensor (30) is disposed in the stator (2) and faces the rear of the dielectric interface (34) of the capacitive deposit sensor (30), the dielectric interface (34) forming an inner wall portion in the flow path of the pumped gas. Turbomolecular vacuum pump (1) comprising a stator (2), a rotor (3) configured to rotate in the stator (2) so as to drive gases that are to be pumped along a gas flow path interposed between the stator (2) and the rotor (3) and at least one capacitive deposit sensor (30), characterized in that a detection head of the capacitive deposit sensor (30) is arranged in the stator (2) to the rear of a dielectric interface (34) of the capacitive deposit sensor (30) that forms an internal wall portion in the flow path of the pumped gases.

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