Bellows joint fitting, method for treatment of process exhaust effluent, and processing apparatus

TW202642097APending Publication Date: 2026-10-16ASM IP HLDG BV
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
TW114149362
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-20
Filing Date
2025-12-16
Publication Date
2026-10-16

Smart Images

  • Figure TWG2TA001080704_001
    Figure TWG2TA001080704_001
  • Figure TWG2TA001080704_002
    Figure TWG2TA001080704_002
  • Figure TWG2TA001080704_003
    Figure TWG2TA001080704_003
Patent Text Reader

Abstract

This disclosure relates to a bellows joint fitting, a method for treatment of process exhaust effluent, and a processing apparatus. The bellows joint fitting has an upstream end for accepting process exhaust effluent and a downstream end for discharging the process exhaust effluent. The bellows joint fitting comprises one or more fluid inlets for introducing dilution fluid to be discharged via the downstream end with the process exhaust effluent.
Need to check novelty before this filing date? Find Prior Art