Glass substrate inspection system with perforation detection

Abstract

This invention provides a glass substrate inspection system suitable for inspecting glass substrates after a perforation process. By utilizing the technical features of each sub-component disclosed by this glass substrate inspection system, inspectors can efficiently obtain the actual perforation pattern of the glass substrate after the perforation process.

Description

Glass substrate inspection system with perforation detection This invention relates to glass inspection technology, and in particular to a suitable inspection system for perforated glass substrates. Currently, when inspecting glass substrates that have undergone the through-glass via (TGV) process, conventional microscopes are generally used to inspect the glass substrate under test. Although this method can obtain the actual appearance of each via on the glass substrate after the through-glass via process, the aforementioned conventional inspection method not only significantly reduces the measurement reliability of the glass substrate that has already undergone the through-glass via process (TGV), thus affecting the yield of subsequent processes, but also causes considerable inconvenience to the inspection personnel because the angle of inspection of the glass substrate under test by conventional microscopes is also greatly limited. Therefore, the present invention aims to improve the yield of glass substrates (TGV, Through Glass Via) after the perforation process. In order to solve the problems described in the prior art, the present invention provides a glass substrate inspection system suitable for inspecting glass substrates through the through-glass via (TGV) process. The technical features of each sub-component revealed by the glass substrate inspection system not only differ from the inspection of the glass substrate under test by using a traditional microscope as mentioned in the prior art, but also enable the inspector to efficiently obtain the actual appearance of the perforations in the glass substrate after the through-glass via process. To achieve the above objectives, the present invention provides a glass substrate inspection system, comprising a microprocessor unit, a carrier unit, a first detection device, and a second detection device; wherein the microprocessor unit, the first detection device, and the second detection device are respectively disposed in the carrier unit, and the microprocessor unit is electrically connected to and electrically controls the carrier unit, the first detection device, and the second detection device, such that the first detection device and the second detection device respectively correspond to a test object placed on the carrier unit; wherein the microprocessor unit has a perforation roundness calculation logic and a perforation coordinate calculation logic per unit area, the perforation roundness calculation logic is used to analyze and calculate the image recognition generated by the test object placed on the carrier unit and generate perforation roundness information, and the perforation coordinate calculation logic per unit area is used to combine the perforation roundness calculation logic and generate perforation coordinate discrimination information per unit area. The technical features of the microprocessor unit of the glass substrate inspection system disclosed in this invention, such as the perforation roundness calculation logic, the perforation coordinate calculation logic per unit area, the first inspection device, and the second inspection device, not only differ from the previous technology of inspecting the glass substrate under test through a traditional microscope, but also enable the inspector to efficiently obtain the actual perforation pattern of the glass substrate after the perforation process. The applicant hereby clarifies that throughout this specification, including the embodiments described below and the various claims within the scope of the patent application, all directional terms are based on the directions of the figures listed in the [Simplified Explanation of Illustrations] of this application. Secondly, in the embodiments and figures to be described below, the same element reference numerals represent the same or similar elements or their structural features. Furthermore, detailed descriptions of the construction, features, assembly or use, and manufacturing methods of this invention will be provided in the subsequent detailed descriptions of the embodiments. However, those skilled in the art should understand that such detailed descriptions and the embodiments listed in this invention are merely for illustrating that this invention can be implemented and are not intended to limit the scope of the patent application. Please refer to Figures 1 and 2, which are disclosed in a preferred embodiment of the present invention, regarding a method for detecting glass substrates 2 (TGV, Through Glass) after a perforation process. The glass substrate inspection system 1 (Via) includes a microprocessor unit 10, a carrier unit 20, a first inspection device 30, a second inspection device 40, and a power supply module 50. The microprocessor unit 10, the first inspection device 30, the second inspection device 40, and the power supply module 50 are each respectively assembled in the carrier unit 20. The microprocessor unit 10 is electrically connected to and controls the carrier unit 20, the first inspection device 30, and the second inspection device 40, so that the first inspection device 30 and the second inspection device 40 correspond to the test object placed on the carrier unit 20, namely the glass substrate 2 after the perforation process in this embodiment. The power supply module 50 is electrically connected to and supplies the power required by the microprocessor unit 10, the carrier unit 20, the first inspection device 30, and the second inspection device 40. Referring again to Figure 1, the microprocessor unit 10 has a perforation roundness calculation logic 11 and a perforation coordinate calculation logic 12 per unit area. The perforation roundness calculation logic 11 is basically used to analyze and process the image recognition calculation logic and generate perforation roundness information. The perforation coordinate calculation logic 12 per unit area is basically used to combine and process the perforation roundness calculation logic 11 and generate perforation coordinate discrimination information per unit area. It is worth mentioning that the perforation roundness calculation logic 11 of the microprocessor unit 10 in the preferred embodiment of the present invention is defined by the radial offset of the actual perforation outline relative to the ideal perforation, that is, the difference between the maximum radius and the minimum radius relative to the same center. It is also worth mentioning that the perforation coordinate calculation logic 12 of the microprocessor unit 10 in the preferred embodiment of the present invention includes, but is not limited to, calculation logic using Fourier transform algorithm, sweep-line algorithm, or a combination thereof. Please refer to Figures 1 to 7 again. The supporting unit 20 includes a plate-shaped platform 21, a platform slide rail assembly 23, and a support arm 25 that is generally vertical and adjacent to the platform slide rail assembly 23. The plate-shaped platform 21 has a top 212 and a bottom 213 corresponding to the top 212. The top 212 of the platform 21 is used to support the glass substrate 2 after the perforation process. Preferably, the top 212 of the platform 21 has a plurality of spaced protrusions 214, so that the glass substrate 2 after the perforation process can be supported on the protrusions 214. The bottom 213 of the platform 21 is pivotally mounted on the platform slide rail assembly 23, so that the platform 21 and the glass substrate 2 can reciprocate and slide according to the track direction of the platform slide rail assembly 23. The support arm 25 includes a The support arm 25 comprises a first slide rail assembly 251, a second slide rail assembly 253, and a base 255. The first slide rail assembly 251 is mounted on the same side of the support arm 25 corresponding to the platform slide rail assembly 23, and the extension direction of the first slide rail assembly 251 is substantially the same as the extension direction of the platform slide rail assembly 23. The second slide rail assembly 253 is pivotally mounted on the first slide rail assembly 251, and the extension direction of the second slide rail assembly 253 is substantially intersecting the extension direction of the first slide rail assembly 251. The base 255 is pivotally mounted on the second slide rail assembly 253 and can reciprocate and slide according to the extension direction of the second slide rail assembly 253. Preferably, the second slide rail assembly 253 and the base 255 can reciprocate and slide according to the extension direction of the first slide rail assembly 251. Please refer to Figures 1 to 7 again. The first detection device 30 and the second detection device 40 are respectively mounted on the base 255 of the support arm 25 of the bearing unit 20. In this way, the first detection device 30 and the second detection device 40 can reciprocate sliding according to the track extension direction of the first slide rail group 251 of the support arm 25 of the bearing unit 20, or they can reciprocate sliding according to the track extension direction of the second slide rail group 253 of the support arm 25 of the bearing unit 20; and the first detection The device 30 includes a camera module 31, which is electrically connected to and controlled by the microprocessor unit 10. The camera module 31 is substantially perpendicular to and corresponds to the direction of the platform slide rail assembly 23 of the support unit 20. The second detection device 40 includes a camera module 41, which is electrically connected to and controlled by the microprocessor unit 10. The camera module 41 is substantially set at a predetermined tilt angle to the direction of the platform slide rail assembly 23 of the support unit 20. It is worth mentioning that the camera module 31 of the first detection device 30 and the camera module 41 of the second detection device 40 are basically composed of an industrial camera (the model of which includes, but is not limited to, MBS2041POE [5m 5472 x 3648 pixels, 5.5fps], GigE [6M black and white 1 / 1.8" / 5m 3072 x 2048 pixels], etc.) and an industrial camera lens (the model of which includes, but is not limited to, FA lens [LM12FC24M], 1X telecentric lens, etc.). The aforementioned technical features are all easily conceived by those skilled in the art after referring to the preferred embodiments of the present invention, or are merely simple substitutions in terms of model, quantity, or size. Therefore, they are not intended to limit the technical features claimed by the present invention, and are hereby stated. The above describes the technical features of the glass substrate inspection system 1 and its various sub-components disclosed in the preferred embodiment of the present invention. The following will further disclose how the glass substrate inspection system 1, through the inspection of the glass substrate 2 after the perforation process (TGV, Through Glass Via), achieves a different effect from the conventional microscopic inspection mentioned in the prior art, and the desired results are as follows: Firstly, please refer to Figures 1 to 4 again. Before the glass substrate inspection system 1 is to perform an inspection, the microprocessor unit 10 of the glass substrate inspection system 1 generates an initial signal and transmits it electrically to the technical features of the support unit 20, the first inspection device 30, and the second inspection device 40 respectively. In this way, the platform slide rail assembly 23 of the support unit 20 can advance the platform 21 to a predetermined horizontal initial position away from the support arm 25 according to the initial signal. It can also raise the second slide rail assembly 253, the base 255, the first inspection device 30, and the second inspection device 40 to a predetermined vertical initial position away from the platform slide rail assembly 23 according to the initial signal. This allows the inspection personnel to achieve the effect of initial mechanism return before inspection. Secondly, please refer to Figures 1 to 7. Next, when the perforated glass substrate 2 (TGV, Through Glass Via) is stably placed on the protrusions 214 of the top 212 of the stage 21 of the support unit 20, the microprocessor unit 10 of the glass substrate detection system 1 generates a test signal and electrically transmits it to the technical features of the support unit 20, the first detection device 30, and the second detection device 40 respectively. In this way, the stage slide rail assembly 23 of the support unit 20 can stably slide the stage 21 and the glass substrate 2 placed on the protrusions 214 of the stage 21 from the predetermined horizontal initial position according to the test signal. Near a predetermined test position below the support arm 25, the first slide rail assembly 251 of the support arm 25 of the bearing unit 20 will also allow the second slide rail assembly 253, the base 255, the first detection device 30, and the second detection device 40 to descend from the predetermined vertical initial position to a predetermined test height relative to the glass substrate 2 placed on the protrusions 214 of the platform 21, according to the test signal. Preferably, the predetermined vertical test distance between the camera lens of the camera module 31 of the first detection device 30 and the glass substrate 2 is between 10 mm and 220 mm, and the predetermined test distance between the camera lens of the camera module 41 of the second detection device 40 and the glass substrate 2 is between 10 mm and 220 mm, thereby enabling the glass substrate detection system 1 to achieve the function of pre-detection mechanism alignment and calibration. Thirdly, please refer to Figures 1 to 8. When the microprocessor unit 10 of the glass substrate inspection system 1 generates an aperture detection signal and transmits it electrically to the support unit 20, the first inspection device 30, and an external display device, the first slide rail group 251 and the second slide rail group 253 of the support arm 25 of the support unit 20 continuously move the base 255 and the first inspection device 30 according to the aperture detection signal until the vertical detection distance between the camera lens of the camera module 31 of the first inspection device 30 and the glass substrate 2 is between 30 mm and 200 mm. A predicted position is selected between 1 μm and 1 mm. At this time, the camera lens of the camera module 31 of the first detection device 30 electrically transmits the partial perforation image data (in this embodiment, the data is basically composed of text, images, multimedia video, or a combination thereof) on the glass substrate 2 to the microprocessor unit 10. The microprocessor unit 10 executes the technical feature of the perforation roundness calculation logic 11. In this way, the perforation roundness calculation logic 11 of the microprocessor unit 10 performs logical operations on the perforation image data captured by the camera lens of the camera module 31 of the first detection device 30 on the glass substrate 2, and then generates perforation roundness discrimination information (including but not limited to any perforation diameter between 1 μm and 1 mm, and a diameter roundness between 0.01 μm and 0.1 mm). Information such as mm is displayed via an externally connected display device, as shown in Figure 8. For the partial perforations 2a, 2b, 2c, and 2d on the glass substrate 2, after the microprocessor unit 10 of the glass substrate inspection system 1 executes the perforation roundness calculation logic 11, the following relevant discrimination information can be obtained: (a) the perforations 2a, 2b, and 2d are valid; (b) perforation 2c is determined to be unperforated; (c) the aperture distance P1 between perforations 2a and 2b; (d) the roundness of perforations 2a and 2b is better than that of perforation 2d. In summary, this allows the glass substrate inspection system 1 to not only inspect the glass substrate under test using a traditional microscope, as mentioned in previous technologies, but also to enable inspectors to efficiently obtain the actual appearance of the perforations (Via) on the glass substrate 2 after the perforation process. Fourth, please refer to Figures 1 to 4 and Figures 9 to 11. Furthermore, when the microprocessor unit 10 of the glass substrate detection system 1 generates a perforation signal per unit area and transmits it electrically to the support unit 20, the first detection device 30, and the external display device, the first slide rail group 251 and the second slide rail group 253 of the support arm 25 of the support unit 20 move the base 255 and the first detection device 30 again according to the perforation signal per unit area until the vertical detection distance between the camera lens of the camera module 31 of the first detection device 30 and the glass substrate 2 is between 30 mm and 200 mm. A predicted position is selected between mm. At this time, the camera lens of the camera module 31 of the first detection device 30 electrically transmits the image data of the plurality of perforations on the glass substrate 2 (in this embodiment, the data is basically composed of text, images, multimedia video, or a combination thereof) to the microprocessor unit 10. The microprocessor unit 10 executes the perforation roundness calculation logic 11 and the unit area perforation coordinate calculation logic 12 simultaneously. In this way, the unit area perforation coordinate calculation logic 12 of the microprocessor unit 10 performs logical operations on the plurality of perforation image data captured by the camera lens of the camera module 31 of the first detection device 30 on the glass substrate 2, and then generates a unit area perforation coordinate discrimination information (i.e., information such as the actual coordinate position of any perforation on the glass substrate 2). The display is provided by the externally connected display device, as shown in Figure 11. The perforations 2e, 2f, 2g, 2h, 2i, 2j, 2k, 2l, and 2m within a unit area on the glass substrate 2 are analyzed by the microprocessor unit 10 of the glass substrate detection system 1. The microprocessor unit 10 executes both the perforation roundness calculation logic 11 and the perforation coordinate calculation logic 12 within the unit area to obtain the relevant discrimination information: (a) the perforation... (a) The perforations 2e, 2f, 2g, 2h, 2i, 2j, and 2l are valid; (b) The perforations 2k and 2m are determined to be unperforated; (c) The perforations 2e and 2f are set as positioning holes, and the diameter distance between them is P2; (d) The roundness of the perforations 2e, 2f, 2g, 2h, and 2l is better than that of the perforations 2i and 2j, and the roundness of the perforation 2i is better than that of the perforation 2j. In summary, the glass substrate inspection system 1 not only differs from the previous technology in that it can inspect the glass substrate under test through a traditional microscope, but also effectively overcomes the limitation that the inspection angle of the glass substrate under test is greatly restricted in the previous technology, thereby obtaining the actual pattern of each perforation or positioning hole per unit area of ​​the glass substrate 2 after the perforation process. Fifth, please refer to Figures 1 to 7, 9 and 10. Finally, after the glass substrate inspection system 1 completes the aforementioned inspection actions, the microprocessor unit 10 of the glass substrate inspection system 1 first generates a reset signal and transmits it electrically to the technical features of the support unit 20, the first inspection device 30 and the second inspection device 40 respectively. In this way, the platform slide rail assembly 23 of the support unit 20 can advance the platform 21 again to the predetermined horizontal initial position away from the support arm 25 according to the reset signal. It will also enable the first slide rail assembly 251 of the support arm 25 of the support unit 20 to lift the second slide rail assembly 253, the base 255, the first inspection device 30 and the second inspection device 40 to the predetermined vertical initial position away from the platform slide rail assembly 23 according to the reset signal, thereby enabling the inspection personnel to achieve the effect of mechanism reset after performing inspection actions. 1: Glass substrate inspection system; 2: Glass substrate; 10: Microprocessor unit; 11: Perforation roundness calculation logic; 12: Perforation coordinate calculation logic per unit area; 20: Bearing unit; 21: Stage; 212: Top; 213: Bottom; 214: Protrusion; 23: Stage slide rail assembly; 25: Support arm; 251: First slide rail assembly; 253: Second slide rail assembly; 255: Base; 30: First inspection device; 31: Camera module; 40: Second inspection device; 41: Camera module; 50: Power supply module; 2a, 2b, 2c, 2d: Perforation; 2e, 2f, 2g, 2h: Perforation; 2i, 2j, 2k, 2l, 2m: Perforation; P1: Aperture distance; P2: Aperture distance. Figure 1 is a system architecture diagram of a preferred embodiment of the present invention, mainly disclosing a glass substrate inspection system suitable for inspecting glass substrates after a perforation process. Figure 2 is a perspective view of some components of the glass substrate inspection system disclosed in Figure 1, mainly disclosing a state in which a glass substrate after a perforation process has not yet been placed in front of the glass substrate inspection system. Figure 3 is a perspective view of some components similar to Figure 2, mainly disclosing a state in which the glass substrate after a perforation process has been placed on a support unit of the glass substrate inspection system. Figure 4 is a perspective view of some components similar to Figure 3, mainly disclosing a state in which the glass substrate after a perforation process and the support unit have been advanced to a position to be inspected. Figure 5 is a perspective view of some components similar to Figure 4, mainly disclosing a state in which a first inspection device and a second inspection device of the glass substrate inspection system descend and approach above the glass substrate after a perforation process. Figure 6 is a front view of Figure 5, mainly showing the state of the first and second detection devices of the glass substrate inspection system after a downward movement, positioned near the glass substrate after the perforation process. Figure 7 is a side view of Figure 6. Figure 8 shows the inspection state of the glass substrate inspection system shown in Figure 6 after the first and second detection devices have captured image data of several perforations in a portion of the glass substrate after the perforation process, and a microprocessor unit has executed a perforation roundness calculation logic. Figure 9 is a similar front view to Figure 5, mainly showing the inspection state of the first and second detection devices of the glass substrate inspection system after a lifting movement, moving away from the glass substrate after the perforation process. Figure 10 is a side view of Figure 9. Figure 11 shows the detection status of the glass substrate inspection system disclosed in Figure 9 after the first inspection device and the second inspection device have captured image data of several perforations in a portion of the glass substrate after the perforation process, and the microprocessor unit has executed a perforation coordinate calculation logic per unit area. 1: Glass substrate inspection system 10: Microprocessor Unit 11: Calculation Logic for Perforation Roundness 12: Calculation logic of perforation coordinates per unit area 20: Bearing unit 30: First Detection Device 40: Second detection device 50: Power Supply Module

Claims

1. A glass substrate inspection system includes: a microprocessor unit (10), a carrier unit (20), a first inspection device (30), and a second inspection device (40); wherein, The microprocessor unit (10), the first detection device (30), and the second detection device (40) are each respectively assembled in the carrier unit (20), and the microprocessor unit (10) is electrically connected to and electrically controls the carrier unit (20), the first detection device (30), and the second detection device (40), such that the first detection device (30) and the second detection device (40) each correspond to a test object placed on the carrier unit (20); wherein, one of the camera modules (31) of the first detection device (30) is vertically aligned with and corresponds to the test object placed on the carrier unit (20), and one of the camera modules (41) of the second detection device (40) is aligned with the test object placed on the carrier unit (20). The test object on the carrier unit (20) is set at a predetermined tilt angle; wherein, the microprocessor unit (10) has a perforation roundness calculation logic (11) and a perforation coordinate calculation logic (12) per unit area. The perforation roundness calculation logic (11) is used to analyze and calculate the image recognition generated by the actual perforation contour of the test object placed on the carrier unit (20) and generate perforation roundness information by the radial offset relative to the ideal perforation or the difference between the maximum radius and the minimum radius relative to the same center. The perforation coordinate calculation logic (12) is used to combine the calculation of the perforation roundness calculation logic (11) and generate perforation coordinate discrimination information per unit area and the actual coordinate position information of any perforation on the test object. The glass substrate inspection system as described in claim 1, wherein, The support unit (20) includes a plate-shaped platform (21), a platform slide rail assembly (23), and a support arm (25) that is vertical and adjacent to the platform slide rail assembly (23). The platform (21) is pivotally mounted on the platform slide rail assembly (23), so that the object to be tested placed on the platform (21) can reciprocate and slide according to the track direction of the platform slide rail assembly (23). The glass substrate inspection system as described in claim 2, wherein, The platform (21) of the support unit (20) has a top (212) and a bottom (213) corresponding to the top (212); wherein, the top (212) of the platform (21) is provided with a plurality of spaced protrusions (214) so ​​that the object to be tested can be supported on the protrusions (214), and the bottom (213) of the platform (21) is pivotally mounted on the platform slide rail assembly (23) so that the object to be tested placed on the platform (21) can reciprocate and slide according to the track direction of the platform slide rail assembly (23). The glass substrate inspection system as described in claim 3, wherein, The support arm (25) of the bearing unit (20) includes a first slide rail group (251), a second slide rail group (253), and a base (255). The first slide rail group (251) is assembled on the same side of the support arm (25) corresponding to the platform slide rail group (23). The second slide rail group (253) is pivotally mounted on the first slide rail group (251), and the extension direction of the slide rail of the second slide rail group (253) is intersected with that of the first slide rail group (251). The base (255) is pivotally mounted on the second slide rail group (253). The second slide rail group (253) and the base (255) can reciprocate and slide according to the extension direction of the track of the first slide rail group (251). The glass substrate inspection system as described in claim 4, wherein, The first detection device (30) and the second detection device (40) are respectively installed on the base (255) of the support arm (25) of the bearing unit (20). The glass substrate inspection system as described in claim 2, wherein, The support arm (25) of the bearing unit (20) includes a first slide rail group (251), a second slide rail group (253), and a base (255). The first slide rail group (251) is assembled on the same side of the support arm (25) corresponding to the platform slide rail group (23). The second slide rail group (253) is pivotally mounted on the first slide rail group (251), and the extension direction of the slide rail of the second slide rail group (253) is intersected with that of the first slide rail group (251). The base (255) is pivotally mounted on the second slide rail group (253). The second slide rail group (253) and the base (255) can reciprocate and slide according to the extension direction of the track of the first slide rail group (251). The glass substrate inspection system as described in claim 6, wherein, The first detection device (30) and the second detection device (40) are respectively installed on the base (255) of the support arm (25) of the bearing unit (20).

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