Glass substrate inspection system with perforated waist

Abstract

This invention provides a glass substrate inspection system suitable for inspecting glass substrates after a perforation process. By utilizing the technical features of each sub-component disclosed by this glass substrate inspection system, inspectors can efficiently obtain the actual appearance of the perforated portion of the glass substrate after the perforation process.

Description

Technical Field

[0001] The present invention is related to glass detection technology, and in particular to a detection system suitable for perforated glass substrates. Prior Art

[0002] Currently, inspection of through-glass via (TGV) glass substrates after the TGV process is typically performed using a conventional microscope. While this method can capture the actual appearance of each via in the TGV-treated glass substrate, it significantly reduces measurement reliability, thereby impacting the yield of subsequent processes. Furthermore, conventional microscopes are subject to significant limitations on the angles at which they can be inspected, significantly inconvenient for inspection personnel.

[0003] Therefore, how to effectively improve the yield of glass substrates after the through-glass via (TGV) process is actually an urgent goal to be improved in the present invention. Summary of the Invention

[0004] In order to solve the problems described in the prior art, the present invention provides a glass substrate inspection system suitable for inspecting glass substrates that have undergone a perforation process (TGV, Through Glass Via). Through the technical features of the various sub-components disclosed in the glass substrate inspection system, in addition to being able to inspect the glass substrate to be inspected differently from the traditional microscope mentioned in the prior art, it can also enable inspection personnel to efficiently obtain the actual appearance of the perforation waist of the glass substrate after the perforation process.

[0005] In order to achieve the above-mentioned purpose, the present invention provides a glass substrate detection system, which includes a microprocessing unit, a carrying unit, a first detection device and a second detection device; wherein the microprocessing unit, the first detection device and the second detection device are respectively assembled on the carrying unit, and the microprocessing unit is respectively electrically connected and respectively electrically controls the carrying unit, the first detection device and the second detection device, so that the first detection device and the second detection device respectively correspond to a test object placed on the carrying unit; wherein the microprocessing unit has a unit area perforation compensation angle calculation logic and a perforation waist detection calculation logic, the unit area perforation compensation angle calculation logic is used to analyze and calculate the image recognition generated by the test object placed on the carrying unit and generate a unit area perforation compensation angle judgment information, and the perforation waist detection calculation logic is used to combine the calculation of the unit area perforation compensation angle logic and generate a perforation waist judgment information.

[0006] The technical features of the microprocessor unit of the glass substrate inspection system disclosed in the present invention, such as the unit area perforation compensation angle calculation logic, the perforation waist detection calculation logic, the first detection device, and the second detection device, can not only detect the glass substrate to be tested in a different way from the traditional microscope mentioned in the prior art, but also enable inspection personnel to efficiently obtain the actual appearance of the perforation waist of the glass substrate after the perforation process. Simple diagram description

[0007] FIG1 is a system architecture diagram of a preferred embodiment of the present invention, which mainly discloses a glass substrate inspection system suitable for inspecting a glass substrate after a perforation process.

[0008] FIG2 is a three-dimensional schematic diagram of some components of the glass substrate inspection system disclosed in FIG1 , mainly illustrating a state where a glass substrate having undergone a perforation process has not yet been placed in front of the glass substrate inspection system.

[0009] FIG3 is a partial schematic perspective view similar to FIG2 , mainly showing a state in which the glass substrate after the perforation process is placed on a carrying unit of the glass substrate inspection system.

[0010] FIG4 is a partial schematic perspective view of components similar to FIG3 , mainly showing a state in which the glass substrate and the carrying unit have been pushed to a position to be inspected after the perforation process.

[0011] 5 is a partial perspective schematic diagram similar to FIG4 , mainly illustrating a state in which a first inspection device and a second inspection device of the glass substrate inspection system are moved downward and close to the top of the glass substrate after the perforation process.

[0012] FIG6 is a front view schematic diagram similar to FIG5 , mainly illustrating the inspection state of the glass substrate inspection system in which the first inspection device and the second inspection device are lifted and moved away from the glass substrate after the perforation process.

[0013] FIG7 is a schematic side view of FIG6 .

[0014] FIG8 is a schematic diagram showing the detection status of the glass substrate detection system disclosed in FIG6 after the first detection device and the second detection device capture a plurality of local perforation image data of the glass substrate after the perforation process, and the microprocessor unit executes a perforation compensation angle calculation logic and a perforation waist detection calculation logic.

[0015] FIG9 is a schematic diagram of the side view detection state of FIG8. Implementation Method

[0016] The applicant first clarifies that throughout this specification, including the embodiments described below and the various claims in the patent application, directional terms are based on the directions of the various figures listed in the [Brief Description of the Figures] of this application. Furthermore, in the embodiments and figures described below, identical component numbers represent identical or similar components or structural features. Furthermore, the detailed structure, features, assembly, use, and manufacturing methods of the present invention will be described in the subsequent detailed description of the embodiments. However, those skilled in the art should understand that such detailed descriptions and the examples listed in the present invention are intended solely to illustrate how the present invention can be implemented and are not intended to limit the scope of the patent application.

[0017] Please refer to FIG. 1 , which shows a preferred embodiment of the present invention, which is suitable for detecting a glass substrate 2 after a through-hole process (TGV, Through Glass Via) is a glass substrate inspection system 1, which includes a micro-processing unit 10, a carrier unit 20, a first inspection device 30, a second inspection device 40, and a power supply module 50. The micro-processing unit 10, the first inspection device 30, the second inspection device 40, and the power supply module 50 are respectively assembled on the carrier unit 20. The micro-processing unit 10 is respectively electrically connected to and electrically controls the carrier unit 20, the first inspection device 30, and the second inspection device 40, so that the first inspection device 30 and the second inspection device 40 correspond to the object to be inspected placed on the carrier unit 20, i.e., the glass substrate 2 after the perforation process in this embodiment. The power supply module 50 is respectively electrically connected to and supplies power required by the micro-processing unit 10, the carrier unit 20, the first inspection device 30, and the second inspection device 40.

[0018] Please refer to FIG1 again. The microprocessing unit 10 has a unit area perforation compensation angle calculation logic 13 and a perforation waist detection calculation logic 14. The unit area perforation compensation angle calculation logic 13 is basically used to analyze and calculate the image recognition calculation logic of the object to be measured placed on the carrier unit 20, thereby generating a unit area perforation compensation angle judgment information. The perforation waist detection calculation logic 14 is used to combine and calculate the unit area perforation compensation angle calculation logic 13, thereby generating a perforation waist judgment information. It is worth mentioning that the unit area perforation compensation angle calculation logic 13 of the microprocessing unit 10 of the preferred embodiment of the present invention is based on the dot product algorithm (dot product), the cross product algorithm (cross product) or a combination thereof; it is worth mentioning that the unit area perforated waist detection algorithm 14 of the micro-processing unit 10 mentioned in the preferred embodiment of the present invention is composed of but not limited to the algorithm logic using the Fourier transform algorithm, the sweep-line algorithm, the kernel method or a combination thereof.

[0019] 1 and 2 , the carrying unit 20 includes a plate-shaped carrier 21, a carrier rail assembly 23, and a support arm 25 that is substantially perpendicular and adjacent to the carrier rail assembly 23. The plate-shaped carrier 21 has a top 212 and a bottom 213 corresponding to the top 212. The top 212 of the carrier 21 is used to carry the glass substrate 2 after the perforation process. Preferably, the top 212 of the carrier 21 has a plurality of spaced-apart ridges 214 so that the glass substrate 2 after the perforation process can be carried on the ridges 214. The bottom 213 of the carrier 21 is pivotally mounted on the carrier rail assembly 23 so that the carrier 21 and the glass substrate 2 can slide back and forth along the track direction of the carrier rail assembly 23. The support arm 25 includes a The support arm 25 comprises a first slide rail group 251, a second slide rail group 253 and a base 255. The first slide rail group 251 of the support arm 25 is arranged on the same side of the support arm 25 corresponding to the carrier slide rail group 23, and the slide rail extension direction of the first slide rail group 251 is basically arranged in the same direction as the slide rail extension direction of the carrier slide rail group 23. The second slide rail group 253 of the support arm 25 is pivoted on the first slide rail group 251, and the slide rail extension direction of the second slide rail group 253 is basically arranged to cross the slide rail extension direction of the first slide rail group 251. The base 255 is pivoted on the second slide rail group 253 and can perform reciprocating sliding motion according to the track extension direction of the second slide rail group 253. Preferably, the second slide rail group 253 and the base 255 can perform reciprocating sliding motion according to the track extension direction of the first slide rail group 251.

[0020] Please refer to Figures 1 to 7 again, and the first detection device 30 and the second detection device 40 are respectively installed on the base 255 of the support arm 25 of the carrier unit 20. In this way, the first detection device 30 and the second detection device 40 can slide back and forth according to the track extension direction of the first slide rail group 251 of the support arm 25 of the carrier unit 20, or can slide back and forth according to the track extension direction of the second slide rail group 253 of the support arm 25 of the carrier unit 20; and the first detection device 30 and the second detection device 40 can slide back and forth according to the track extension direction of the first slide rail group 251 of the support arm 25 of the carrier unit 20. The device 30 includes a camera module 31, and the camera module 31 is electrically connected and electrically controlled by the micro-processing unit 10, wherein the camera module 31 is basically vertical and corresponds to the direction of the carrier slide rail group 23 of the carrier unit 20; and the second detection device 40 includes a camera module 41, and the camera module 41 is electrically connected and electrically controlled by the micro-processing unit 10, wherein the camera module 41 is basically set at a predetermined inclination angle to the direction of the carrier slide rail group 23 of the carrier unit 20. It is worth mentioning that the camera module 31 of the first detection device 30 and the camera module 41 of the second detection device 40 are basically composed of an industrial camera (whose models include but are not limited to MBS2041POE [5m 5472 x 3648 pixels, 5.5fps], GigE [6M black and white 1 / 1.8" / 5m 3072 x 2048 pixels], etc.) and an industrial camera lens (whose models include but are not limited to FA lens [LM12FC24M], 1X telecentric lens, etc.). The aforementioned technical features are all easily conceivable by those with ordinary knowledge in the relevant technical field after referring to the preferred embodiments of the present invention, or are merely simple replacement changes in model, quantity or size. Therefore, they are not intended to limit the technical features claimed by the present invention, and are therefore stated in advance.

[0021] The above are the technical features of the glass substrate inspection system 1 and its various sub-components disclosed in a preferred embodiment of the present invention. The following will further disclose how the glass substrate inspection system 1 can be used to inspect glass substrates 2 that have undergone a through-glass via (TGV) process, thereby performing inspections that differ from conventional microscope inspections in the prior art and achieving the following desired benefits:

[0022] First, referring to Figures 1 to 4 , before the glass substrate inspection system 1 is about to perform an inspection, the microprocessor 10 of the glass substrate inspection system 1 generates an initial signal and electrically transmits it to the carrier unit 20, the first inspection device 30, and the second inspection device 40. This allows the carrier rail assembly 23 of the carrier unit 20 to propel the carrier 21 to a predetermined horizontal initial position away from the support arm 25 based on the initial signal. Furthermore, the first rail assembly 251 of the support arm 25 of the carrier unit 20 simultaneously lifts the second rail assembly 253, the base 255, the first inspection device 30, and the second inspection device 40 to a predetermined vertical initial position away from the carrier rail assembly 23 based on the initial signal. This allows the inspector to achieve a preliminary reset of the mechanism before conducting an inspection.

[0023] Secondly, please refer to Figures 1 to 5 . Next, when the glass substrate 2 (TGV, Through Glass Via) that has undergone the perforation process is stably placed on the ridges 214 of the top 212 of the carrier 21 of the carrier unit 20, the microprocessor 10 of the glass substrate inspection system 1 generates a test signal and electrically transmits it to the carrier 20, the first inspection device 30, and the second inspection device 40. This allows the carrier rail assembly 23 of the carrier unit 20 to stably slide the carrier 21 and the glass substrate 2 placed on the ridges 214 of the carrier 21 from the predetermined horizontal initial position to a predetermined test position near the bottom of the support arm 25 based on the test signal. Simultaneously, the first rail assembly 23 of the support arm 25 of the carrier unit 20 is also moved. The assembly 251 can lower the second slide rail assembly 253, the base 255, the first inspection device 30, and the second inspection device 40 from the predetermined vertical initial position to a predetermined height to be measured from the glass substrate 2 placed on the ridges 214 of the stage 21 according to the signal to be measured. Preferably, the predetermined vertical distance to be measured between the camera lens of the camera module 31 of the first inspection device 30 and the glass substrate 2 is between 10 mm and 220 mm, and the predetermined vertical distance to be measured between the camera lens of the camera module 41 of the second inspection device 40 and the glass substrate 2 is between 10 mm and 220 mm, thereby achieving the effect of pre-inspection mechanism alignment calibration of the glass substrate inspection system 1 as a whole.

[0024] Third, referring to Figures 1 to 9, when the microprocessor unit 10 of the glass substrate inspection system 1 generates a compensation angle signal and transmits it electrically to the carrier unit 20, the first inspection device 30, and the second inspection device 40, the first slide rail assembly 251 and the second slide rail assembly 253 of the support arm 25 of the carrier unit 20 both move the first inspection device 30 again according to the compensation angle signal until the camera lens of the camera module 31 of the first inspection device 30 is aligned with the compensation angle signal. The vertical detection distance between the camera lens of the camera module 41 of the second detection device 40 and the glass substrate 2 is between 30 mm and 200 mm, wherein a predetermined detection angle is formed between the camera lens of the camera module 41 of the second detection device 40 and the glass substrate 2 and is between 20 degrees and 70 degrees. At this time, the camera lens of the camera module 31 of the first detection device 30 and the camera lens of the camera module 41 of the second detection device 40 are respectively on the glass substrate 2. The plurality of perforation image data (in this embodiment, the data is essentially composed of text, images, multimedia videos, or a combination thereof) is electronically transmitted to the micro-processing unit 10, so that the micro-processing unit 10 executes the technical features of the unit-area perforation compensation angle calculation logic 13. Thus, the unit-area perforation compensation angle calculation logic 13 of the micro-processing unit 10 performs a logical operation based on the plurality of perforation image data captured on the glass substrate 2 by the camera lens of the camera module 31 of the first detection device 30 and the camera lens of the camera module 41 of the second detection device 40, thereby generating unit-area perforation compensation angle discrimination information (including but not limited to a perforation compensation angle formed between any actual perforation on the glass substrate 2 and any imaginary compensation line L vertically penetrating the glass substrate 2, wherein the perforation compensation angle is based on information such as the imaginary compensation line L being between 0 degrees and 50 degrees). The information is then displayed on a display device electrically connected to an external device. 8 and 9 , for the local through-holes 2n, 2o, 2p, and 2q on the glass substrate 2, after the microprocessor 10 of the glass substrate inspection system 1 executes the unit area through-hole compensation angle calculation logic 13, the following relevant judgment information can be obtained: (a) the through-holes 2n, 2o, and 2p are confirmed to be through-holes, and the through-hole 2n has the best penetration through the glass substrate 2; (b) the through-hole 2q is determined to be not through-holes; (c) the through-hole compensation angle θ1 of the through-hole 2o based on the imaginary compensation line L is approximately greater than or equal to 1 degree and less than 10 degrees, the through-hole compensation angle θ2 of the through-hole 2p based on the imaginary compensation line L is approximately greater than or equal to 10 degrees and less than 30 degrees, and the through-hole compensation angle θ3 of the through-hole 2q based on the imaginary compensation line L is approximately greater than or equal to 30 degrees and less than 50 degrees.In summary, the glass substrate inspection system 1 not only distinguishes itself from conventional microscopes in the prior art in inspecting glass substrates, but also effectively overcomes the significant limitations of conventional microscopes in inspecting glass substrates at certain angles, thereby obtaining the actual pattern of perforation compensation angles between each perforation within a unit area of ​​the glass substrate 2 after the perforation process.

[0025] Fourthly, please refer to Figures 1 to 9 together. When the microprocessor unit 10 of the glass substrate detection system 1 generates a perforation waist detection signal and transmits it electrically to the carrier unit 20, the first detection device 30, and the second detection device 40, the first slide rail group 251 and the second slide rail group 253 of the support arm 25 of the carrier unit 20 both move the first detection device 30 again according to the perforation waist detection signal until the vertical detection distance between the camera lens of the camera module 31 of the first detection device 30 and the camera lens of the camera module 41 of the second detection device 40 and the glass substrate 2 is between 30 mm and 40 mm. 200mm, wherein a predetermined detection angle is formed between the camera lens of the camera module 41 of the second detection device 40 and the glass substrate 2 and is between 20 degrees and 70 degrees. At this time, the camera lens of the camera module 31 of the first detection device 30 and the camera lens of the camera module 41 of the second detection device 40 respectively transmit the plurality of perforation image data on the glass substrate 2 (in this embodiment, the data is basically composed of text, images, multimedia videos or a combination thereof) to the micro-processing unit 10, so that the micro-processing unit 10 executes the unit area perforation compensation angle calculation logic 13 and the The technical features of the perforation waist detection algorithm 14 are such that the perforation waist detection algorithm 14 of the microprocessor unit 10 can perform a logical operation based on the plurality of perforation image data captured from the glass substrate 2 by the camera lens of the camera module 31 of the first detection device 30 and the camera lens of the camera module 41 of the second detection device 40, and then generate a perforation waist discrimination information (including but not limited to information such as whether any actual perforation waist on the glass substrate 2 is less than or equal to the aperture of any actual perforation) and display it by the display device electrically connected to the outside, that is, as shown in Figures 8 and 9, the local perforation waist on the glass substrate 2 Among the perforations 2n, 2o, 2p, and 2q, the microprocessor 10 of the glass substrate inspection system 1 executes the unit area perforation compensation angle calculation logic 13 and the perforation waist detection calculation logic 14 simultaneously, and the following related judgment information can be obtained: (a) the perforations 2n, 2o, and 2p are perforated, among which the perforation 2n has the best penetration through the glass substrate 2; (b) the perforation 2q is determined to be not perforated; (c) the perforation waist B1 of the perforation 2n is less than or equal to the aperture of the perforation 2n, the perforation waist B2 of the perforation 2o is slightly smaller than the aperture of the perforation 2o, and the perforation waist B3 of the perforation 2q is smaller than the aperture of the perforation 2q.In summary, the glass substrate inspection system 1 not only distinguishes itself from conventional microscopes in the prior art in inspecting glass substrates, but also effectively overcomes the significant limitations of conventional microscopes in inspecting glass substrates at certain angles, thereby providing the ability to determine whether each perforation per unit area of ​​the glass substrate 2 effectively penetrates the glass substrate 2 after the perforation process.

[0026] Fifth, referring to Figures 1 to 7 , after the glass substrate inspection system 1 completes the aforementioned inspection operations, the microprocessor 10 of the glass substrate inspection system 1 generates a reset signal and transmits it electrically to the carrier unit 20, the first inspection device 30, and the second inspection device 40, respectively. This allows the carrier rail assembly 23 of the carrier unit 20 to advance the carrier 21 back to the predetermined horizontal initial position away from the support arm 25 based on the reset signal. Furthermore, the first rail assembly 251 of the support arm 25 of the carrier unit 20 simultaneously raises the second rail assembly 253, the base 255, the first inspection device 30, and the second inspection device 40 to the predetermined vertical initial position away from the carrier rail assembly 23 based on the reset signal. This allows the inspection personnel to achieve the mechanism reset after the inspection operation.

[0027] 1:Glass substrate inspection system

[0028] 2: Glass substrate

[0029] 10: Microprocessing unit

[0030] 13: Calculation logic of perforation compensation angle per unit area

[0031] 14: Perforated waist detection algorithm logic

[0032] 20: Carrying unit

[0033] 21: Carrier

[0034] 212: Top

[0035] 213: bottom

[0036] 214: Convex Wall

[0037] 23: Stage slide rail assembly

[0038] 25: Support arm

[0039] 251: First slide rail group

[0040] 253: Second slide rail set

[0041] 255: Base

[0042] 30: First detection device

[0043] 31: Camera module

[0044] 40: Second detection device

[0045] 41: Camera module

[0046] 50: Power supply module

[0047] 2n, 2o, 2p, 2q: perforation

[0048] θ1, θ2, θ3: Perforation compensation angle

[0049] B1, B2, B3: Perforated waist

Claims

1. A glass substrate inspection system, comprising: a microprocessor unit (10), a carrier unit (20), a first inspection device (30), and a second inspection device (40); wherein: The microprocessor unit (10), the first detection device (30), and the second detection device (40) are respectively assembled on the carrier unit (20), and the microprocessor unit (10) is respectively electrically connected to and electrically controls the carrier unit (20), the first detection device (30), and the second detection device (40), so that the first detection device (30) and the second detection device (40) respectively correspond to a test object placed on the carrier unit (20); wherein the microprocessor unit (10) The unit (10) has a unit area perforation compensation angle calculation logic (13) and a perforation waist detection calculation logic (14). The perforation compensation angle calculation logic (13) is used to analyze and calculate the image recognition generated by the object to be tested placed on the supporting unit (20) and generate a unit area perforation compensation angle judgment information. The perforation waist detection calculation logic (14) is used to combine and calculate the unit area perforation compensation angle calculation logic (13) and generate a perforation waist judgment information.

2. The glass substrate inspection system of claim 1, wherein: The carrying unit (20) comprises a plate-shaped carrier (21), a carrier slide rail assembly (23), and a support arm (25) vertically disposed and adjacent to the carrier slide rail assembly (23). The carrier (21) is pivotally mounted on the carrier slide rail assembly (23), so that the object to be measured placed on the carrier (21) can slide back and forth according to the track direction of the carrier slide rail assembly (23).

3. The glass substrate inspection system according to claim 2, wherein: The carrier (21) of the carrying unit (20) has a top (212) and a bottom (213) corresponding to the top (212); wherein the top (212) of the carrier (21) is provided with a plurality of spaced-apart convex walls (214) so ​​that the object to be tested can be carried on the convex walls (214); the bottom (213) of the carrier (21) is pivotally mounted on the carrier slide rail assembly (23) so that the object to be tested placed on the carrier (21) can slide back and forth according to the track direction of the carrier slide rail assembly (23).

4. The glass substrate inspection system according to claim 3, wherein: The support arm (25) of the carrier unit (20) includes a first slide rail group (251), a second slide rail group (253) and a base (255). The first slide rail group (251) is arranged on the same side of the support arm (25) as the carrier slide rail group (23). The second slide rail group (253) is pivoted on the first slide rail group (251), and the slide rail extension direction of the second slide rail group (253) is cross-arranged with the first slide rail group (251). The base (255) is pivoted on the second slide rail group (253); wherein, the second slide rail group (253) and the base (255) can slide back and forth according to the track extension direction of the first slide rail group (251).

5. The glass substrate inspection system according to claim 4, wherein: The first detection device (30) and the second detection device (40) are respectively mounted on the base (255) of the support arm (25) of the carrying unit (20).

6. The glass substrate inspection system according to claim 2, wherein: The support arm (25) of the carrier unit (20) includes a first slide rail group (251), a second slide rail group (253) and a base (255). The first slide rail group (251) is arranged on the same side of the support arm (25) as the carrier slide rail group (23). The second slide rail group (253) is pivoted on the first slide rail group (251), and the slide rail extension direction of the second slide rail group (253) is cross-arranged with the first slide rail group (251). The base (255) is pivoted on the second slide rail group (253); wherein, the second slide rail group (253) and the base (255) can slide back and forth according to the track extension direction of the first slide rail group (251).

7. The glass substrate inspection system according to claim 6, wherein: The first detection device (30) and the second detection device (40) are respectively mounted on the base (255) of the support arm (25) of the carrying unit (20).

8. The glass substrate inspection system according to any one of claims 1 to 7, wherein: The first detection device (30) includes a camera module (31) that is electrically connected to and electrically controlled by the microprocessor unit (10), and the camera module (31) is vertical and corresponds to the object to be tested placed on the carrier unit (20); wherein the second detection device (40) includes a camera module (41) that is electrically connected to and electrically controlled by the microprocessor unit (10), and the camera module (41) is arranged at a predetermined tilt angle with the object to be tested placed on the carrier unit (20).

9. The glass substrate inspection system of claim 8, wherein: The unit area perforation compensation angle discrimination information generated by the unit area perforation compensation angle calculation logic (13) of the microprocessing unit (10) includes a perforation compensation angle formed between any actual perforation and an imaginary compensation line (L), wherein the perforation compensation angle is between 0 degrees and 50 degrees based on the imaginary compensation line (L).

10. The glass substrate inspection system according to claim 9, wherein: The perforation waistline identification information generated by the perforation waistline detection calculation logic (14) of the microprocessing unit (10) includes that any actual perforation waistline is less than or equal to the aperture of any actual perforation.

Images