Apparatus for monitoring a process chamber and process device

TW202642148APending Publication Date: 2026-10-16MASCHINENFABRIK GUSTAV EIRICH GMBH & CO KG
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Patent Information

Application Number
TW115113355
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-04-03
Filing Date
2026-04-02
Publication Date
2026-10-16

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Abstract

An apparatus for monitoring a process chamber includes a light sensor, a light source, and a cover for the light sensor and the light source; wherein the light sensor and the light source face the process chamber; wherein the cover is movable from a covered position to a released position and back, in the covered position the cover separates the light sensor and / or the light source from the process chamber, and in the released position the cover allows the light sensor and / or the light source to observe the process chamber; wherein the light sensor, the light source, and the cover are pivotable together about at least one main axis.
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