Vacuum environment optical inspection system

Abstract

A vacuum environment optical inspection system for conducting optical inspections on a target object. The disclosure includes a housing, a first rotation device, a second rotation device, a reflection device, and an inspection device. The housing maintains a vacuum environment. The first rotation device is installed within the housing and controls the position of the target object. The second rotation device is also installed within the housing and controls the position of the reflection device. The inspection device is located outside the housing, and inspection light is reflected within the housing by the target object and the reflection device before being output to the inspection device for analysis. Through the coordinated arrangement of these components, this disclosure reduces the need for expensive optical inspection equipment to be placed within the vacuum environment, thereby effectively lowering both system setup costs and maintenance costs.

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