Probe card and its manufacturing method

TW202642173APending Publication Date: 2026-10-16NIHON MICRONICS KK
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Patent Information

Application Number
TW115108007
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-04-02
Filing Date
2026-03-05
Publication Date
2026-10-16

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Abstract

The probe card of the present invention comprises: a probe having a front end that contacts a wafer; a guide member having a guide hole for the probe to pass through; and a wiring board having a terminal portion that engages with the base end of the probe; the wiring board comprises: a main surface having the terminal portion; and a pedestal portion having a main surface that protrudes more than the terminal portion and forming a space between the main surface and the guide member. none
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