Automatic optical inspection system

Abstract

An automatic optical inspection system includes a structured illumination microscope. The structured illumination microscope includes a light pattern generator, a first camera device and a lens unit. The light pattern generator can emit a pattern light beam with light and dark variations. The first camera device is used to capture images. The lens unit has a projection lens group and an image-taking lens group. The projection lens group is used for projecting the pattern light beam emitted by the light pattern generator into a projection focal plane pattern. The image-taking lens group is used for imaging the projection focal plane pattern on the first imaging device. The depth of field of the projection lens group is shallower than that of the image-taking lens group, thereby enabling the structured illumination microscope to improve the 2D imaging speed while maintaining good 3D imaging capability, thereby taking into account both 2D detection speed and 3D detection capability.

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