Temperature control system
TW202642285APending Publication Date: 2026-10-16EBARA CORP
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Patent Information
- Application Number
- TW115102931
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-04-04
- Filing Date
- 2026-01-26
- Publication Date
- 2026-10-16
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Figure TWG2TA001081027_001 
Figure TWG2TA001081027_002 
Figure TWG2TA001081027_003
Abstract
The present invention provides a temperature control system (1) for controlling the temperature of a semiconductor manufacturing apparatus, comprising: a cooling device (3) for cooling coolant; a coolant reservoir (15) connected to a coolant return line (11); a first temperature measuring device (61) disposed upstream of the coolant reservoir (15) for measuring a first temperature of the coolant flowing through the coolant return line (11); a second temperature measuring device (62) disposed downstream of the coolant reservoir (15) for measuring a second temperature of the coolant flowing through the coolant return line (11); and an operation control unit (60) for calculating an index temperature using the first temperature and the second temperature, and a first weight and a second weight calculated by multiplying the first temperature and the second temperature respectively, and performing feedforward control of the cooling device (3) based on the index temperature.
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