Inspection system

TW202642462APending Publication Date: 2026-10-16KAWASAKI JUKOGYO KK
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Patent Information

Application Number
TW115105052
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-17
Filing Date
2026-02-09
Publication Date
2026-10-16

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    Figure TWG2TA001081095_003
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Abstract

An inspection system is provided, including an illumination unit configured to irradiate a workpiece with illumination light, an imaging unit configured to capture an image of the workpiece, and a robot configured to relatively move at least one of the illumination unit and the imaging unit with respect to the workpiece. An imaging-side working distance between the workpiece and the imaging unit is greater than an illumination-side working distance between the workpiece and the illumination unit.
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