Temperature sensor and temperature sensing structure

Abstract

This invention provides a thin-film temperature sensor, which provides responsive and accurate temperature measurement and is particularly suitable for surface-mount devices, having a thermistor thin film formed on a portion of the surface of a substrate, and a temperature sensing structure using the same. A temperature sensor has a thermistor thin film formed on a portion of the surface of a substrate. The temperature sensor includes an electrode group comprising a pair of surface electrodes, a back electrode, a through electrode, and a connecting electrode. The pair of surface electrodes and the back electrode are located around the thermistor thin film and are formed facing each other on the surface and back, respectively, with the substrate sandwiched in the middle. The through electrode electrically connects the surface electrode and the back electrode. The connecting electrode electrically connects the thermistor thin film to the surface electrode and is formed on the surface. In the thermistor region of the surface, which includes at least the surface electrode, the thermistor thin film, and the connecting electrode on its inner side, the height of the thermistor thin film and the connecting electrode is formed below the height of the surface electrode. Furthermore, the temperature sensing structure allows the temperature sensor to exist between the main substrate and electronic components.

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