Devices and methods for enhancing laser radiation using laser crystals
TW202642611APending Publication Date: 2026-10-16TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
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Patent Information
- Application Number
- TW115105519
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-02-26
- Filing Date
- 2026-02-11
- Publication Date
- 2026-10-16
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Abstract
This application relates to an apparatus (10) for enhancing laser radiation, comprising a laser crystal (1), particularly a plate-shaped one, and at least two reflecting devices (2, 3), which are configured to reflect the laser radiation to be enhanced, such that the laser radiation passes through the laser crystal (1) in a round-trip manner, wherein the reflecting devices (2, 3) are configured as rear reflectors. Furthermore, this application also relates to a method for enhancing laser radiation, wherein the laser radiation to be enhanced passes through the two reflecting devices (2, 3) in a round-trip manner through a laser crystal (1), particularly a plate-shaped one, wherein the reflecting devices (2, 3) are configured as rear reflectors.
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