Optical detection device

Abstract

The first photodetector according to one embodiment of the present disclosure includes: a semiconductor substrate having opposing first and second surfaces, and a photoelectric conversion unit for each pixel; a light guide unit disposed on the first surface side of the semiconductor substrate, comprising: a plurality of structures each having a size less than or equal to the wavelength of incident light; and a medium disposed in a manner filling the spaces between adjacent plurality of structures and having a refractive index different from that of the plurality of structures; a spacer layer disposed between the semiconductor substrate and the light guide unit, comprising an organic layer and an inorganic layer sequentially deposited from the semiconductor substrate side; a separation groove disposed in a top view in a manner surrounding the plurality of structures, at least separating the organic layer, and exposing the semiconductor substrate on the bottom surface; and a protective film extending at least on the side and bottom surfaces of the separation groove.

Images