Wet processing equipment and pushing structure of magnetic clamper thereof

Abstract

A wet processing equipment and a pushing structure of a magnetic clamper thereof are provided. The wet processing equipment corresponding to a driving unit includes a carrier and two pushing structures. The carrier includes an upper rod and a lower rod connected across a frame and provided with a magnetic clamper having a magnetic clamping end and an end. The pushing structures are respectively corresponding to the upper rod and the lower rod and include two convex block assemblies and two base seats connected to and driven by the driver unit. The base seat has an arranging portion corresponding to the magnetic clamper. The convex block assembly is arranged on the base seat and includes a first convex block and a second convex block. The first convex block and the second convex block are respectively arranged on the arranging portion corresponding to the magnetic clamping end and the end. The driving unit drives the base seats with the convex block assemblies to move. The first convex block pushes the magnetic clamping end to clamp such that the end opens from a closed position to a fully-open position. The second convex block stops the end between the closed position and the fully-open position. A clamping force of the magnetic clamper is therefore reducing to prevent a substrate from cracking or crushing.

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