System for inspecting wafers

TW202642958APending Publication Date: 2026-10-16SCIENTECH CORPORATION
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Patent Information

Application Number
TW114150008
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-12-20
Filing Date
2025-12-18
Publication Date
2026-10-16

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Abstract

A system for inspecting a coated wafer is provided. The system includes a body, an optical sensor module, and a processing module. The body defines a detection space for placing the wafer. The optical sensor module is mounted on the body and configured to inspect the wafer to obtain a set of sensing data. The processing module is electrically connected to the optical sensor module and configured to determine the quality of the coating on the wafer based on the sensing data.
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