Substrate processing chamber
TW202642959APending Publication Date: 2026-10-16APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW115104172
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-02-04
- Filing Date
- 2026-02-03
- Publication Date
- 2026-10-16
Smart Images
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Abstract
A substrate processing chamber includes a first actuator coupled to a first shaft to raise and lower a substrate support, and a second actuator coupled to a second shaft to raise and lower a seal plate disposed below the substrate support. The processing chamber further includes a third actuator coupled to a third shaft to raise and lower a hoop plate to operate a plurality of lift pins.
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