Moving system, opening and closing mechanism and moving method

TW202642964APending Publication Date: 2026-10-16TOKYO ELECTRON LTD
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Patent Information

Application Number
TW115104572
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-02-14
Filing Date
2026-02-05
Publication Date
2026-10-16

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Abstract

A mobile system comprising: a first housing having a first bottom having a first bottom surface and having a first space inside, the first bottom surface facing the first space; a second housing having a second space inside; a connecting channel connecting the first space and the second space and for allowing at least a portion of the mobile body to enter from the first space into the second space; and an opening and closing mechanism comprising: a valve body; a moving mechanism for moving the valve body between an opening region for opening the connecting channel and a closing region for closing the connecting channel; and a driving bottom having a driving bottom surface exposed in the closing region when the valve body is in the opening region and for moving the mobile body between above the driving bottom surface and above the first bottom surface.
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