Substrate processing method and substrate processing apparatus

Abstract

In this substrate processing method, the second conveying mechanism conveys the cleaning fixture from the cleaning fixture receiving section to the substrate placement section, and the first conveying mechanism conveys the substrate from the substrate receiving section to the substrate placement section. In the substrate placement section, the substrate is deposited on the cleaning fixture to obtain the substrate with the cleaning fixture attached as the pre-processing substrate. The second conveying mechanism conveys the pre-processing substrate from the substrate placement section to the processing unit, where the pre-processing substrate is cleaned.

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