Substrate transferring method and system

TW202642968APending Publication Date: 2026-10-16GUDENG PRECISION IND CO LTD
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Patent Information

Application Number
TW115113696
Authority / Receiving Office
TW · TW
Patent Type
Applications
Current Assignee / Owner
Priority Date
2025-04-11
Filing Date
2026-04-08
Publication Date
2026-10-16

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    Figure TWG2TA001081381_003
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Abstract

Substrate transferring method and system for transferring substrate between a first-type container and a second-type container include a first transferring mechanism, a second transferring mechanism, and a substrate transferring platform. The first transferring mechanism is disposed adjacent to the first-type container and is configured to pick and place the substrate and / or a carrier tray carrying the substrate from and into the first-type container. The second transferring mechanism is disposed adjacent to the second-type container and is configured to pick and place the substrate from and into the second-type container. The substrate transferring platform is disposed between the two transferring mechanisms and is configured to receive at least the substrate to facilitate a handover of the substrate between the two mechanisms.
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