Slide clamping mechanism and inspection device

Abstract

A glass slide clamping mechanism relates to the field of semiconductor technology. The glass slide clamping mechanism has a mounting area on its base for placing a glass slide, with two sets of clamping assemblies located on opposite sides of the mounting area. Each clamping assembly includes at least one clamping device, which includes a clamping member, a driving member, a force sensor, a position sensor, and a control system. The control system is electrically connected to the driving member to control the driving member, which is connected to the clamping member. The driving member drives the clamping member to move closer to or away from the side of the glass slide. The force sensor is mounted on the clamping member to detect the clamping force. The force sensor is electrically connected to the driving member to feed the clamping force back to the control system. The position sensor is mounted on the movement path of the clamping member and is electrically connected to the control system.

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